| Model |
V-1000 |
V-1000X |
V-1000XS |
| Plasma Mode |
RIE and DP |
| Main Unit |
| Electrode structure |
Parallel flat stage plate |
| Stage size |
280mmW×280mmD |
300mmW×300mmD(Double stage) |
400mmW×375mmD |
| Chamber size |
400mmW×400mmD×380mmH |
400mmW×400mmD×380mmH |
600mmW×554mmD×440mmH |
| Vacuum gauge |
Capacitance manometer |
| Reaction gas system |
Two systems |
| Controller |
Programmable controller |
| Display |
Programmable terminal (touch panel) |
| Radio-Frequency Power Supply |
| Input |
AC 200/220/380V,Three phase, |
| Radio-frequency output power |
1,000W |
1,000 & 1,500W |
| Reference oscillator |
Quartz oscillator |
| Oscillating frequency |
13.56 MHz |
| Matching adjustment |
Automatic tuning |
| Discharge System (Vacuum Pump) |
| Displacement |
670 & 1,000 liters/min. |
670 & 1,500 liters/min. |
1,000 & 1,500 liters/min. |
| Inlet configuration |
NW40 with a flexible stainless steel hose (1 meter long) |
| Outlet configuration |
NW40 |
| Gas Systems |
| Purge gas |
Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer |
| Driving gas |
Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer |
| Reaction gas G1 |
Oxygen (O2) and a mass flow controller (1000 secm) |
| Reaction gas G2 |
Argon (Ar) and a mass flow controller (100 secm) |
| Safety Mechanisms |
| System Protections |
*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch |
| Actions against a trouble of the vacuum pump |
The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops |
| REQUIRED UTILITIES |
| Power Supply |
| Main unit with vacuum pump |
Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long) |
| Gases |
| Driving gas |
Air or nitrogen (N2) (Feed pressure: 5-7 kgf/cm2) |
| Purge gas |
Nitrogen (N2) (Feed pressure: 2-7 kgf/cm2) |
| Reaction gas G1 |
Oxygen (O2) (Feed pressure: 1.5 kgf/cm2) |
| Reaction gas G2 |
Argon (Ar) (Feed pressure: 1.5 kgf/cm2) |
| Connection port |
1/4" swagelok joint bulkhead union (SS-400-61) |
| |
Note: Pressure regulators, filters and other protective devices shall be prepared by others. |
| Connection Diameter of the Discharge Duct (and inlet Port) |
| Vacuum pump's inlet port |
NW4O (with a flexible stainless steel hose of 1 meter long) |
| Vacuum pump's outlet port |
NW4O |
| Main unit's ozone outlet port |
163mm diameter |
| Oscillator's ventilation port |
163mm diameter |
| |
Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports. |
