| Model |
PDC-200/210/510 |
| Plasma Mode |
PDC-200(RIE or DP) / PDC-210(RIE and DP) |
| Main Unit |
| Aluminum chamber |
Internal dimension: 400mmW×250mmD×150mmH |
| Electrode |
Parallel flat stage plate: 230mmW×170mmD |
| Vacuum gauge |
Capacitance manometer |
| Reaction gas system |
Two systems(Ar,O2) |
| Controller |
Programmable controller |
| Display |
LCD Touch panel Display |
| Radio-Frequency Power Supply |
| Input |
PDC-200: AC 100V,Single phase, 8A (50/60 Hz) / PDC-210: AC 200V,Three phase, 15A (50/60 Hz) |
| Radio-frequency output power |
PDC-200:300W / PDC-210:500W |
| Reference oscillator |
Quartz oscillator |
| Oscillating frequency |
13.56 MHz |
| Matching adjustment |
Automatic tuning |
| Discharge System (Vacuum Pump) only PDC-210 / PDC200 Optional |
| Displacement |
Total 345 liters/min. |
| Input power supply |
Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase ,AC100V,4A,(50/60Hz) |
| Inlet configuration |
NW25 |
| Outlet configuration |
NW25 |
| Gas Systems |
| Purge gas |
Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer |
| Reaction gas G1 |
Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm) |
| Reaction gas G2 |
Argon (Ar) and a mass flow controller (100 secm) |
| Safety Mechanisms |
| System Protections |
(1) Watching Vacuum Pump and RF generater
Watching over current by Thermal Protector Magnetic relay.
(2) Product Quartz oscillator
When Matching unit have miss matching,protect quartz oscillator.
(3) Door Panel Inter lock
Build Inter lock switch. |
| Actions against a trouble of the vacuum pump |
The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding *The treatment process timer stops. |
| REQUIRED UTILITIES |
| Power Supply |
| Main unit with vacuum pump |
PDC-200: Single phases, AC100V, 15 A, 50/60Hz
PDC-210: Three phases, AC200V, 15 A, 50/60Hz
(with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
|
| Gases |
| Purge gas |
Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2) |
| Reaction gas G1 |
Oxygen (O2) (Feed pressure: 1.5 kgf/cm2) |
| Reaction gas G2 |
Argon (Ar) (Feed pressure: 1.5 kgf/cm2) |
| Connection port |
1/4" swagelok joint bulkhead union (SS-400-61) |
| |
Note: Pressure regulators, filters and other protective devices shall be prepared by others. |
| Connection Diameter of the Discharge Duct (and inlet Port) |
| Vacuum pump's inlet port |
NW25 (with a flexible stainless steel hose of 1 meter long) |
| Vacuum pump's outlet port |
NW25 |
| |
Note: Every port has a connector designed for a flexible hose. |
